EXPERIMENTAL SETUP DESIGN FOR ELECTROCHEMICAL DISCHARGE MACHINING
Keywords:
Micromachining, Silicon, EDM, Micro System.Abstract
New technology requires new machining skills. In the last century, the need for using more and more specialized materials (e.g. silicon, composites or ceramics) greatly increased the already large arsenal of machining technology. The last century also saw the birth of micromachining, in particular micromachining of silicon. At present huge variety of micromachining are available for silicon. Similar situation exists for electrically conductive materials, where, in particular electrochemical machining (ECM) and electrical discharge machining (EDM) are two powerful tools are available. However, several electrically non- conductive materials are also of great interest for many applications. Glass and composite materials are two examples. The technical requirements for using glass in micro system are growing. Medical devices requiring biocompatible materials are only one many of examples.